Diffusion-oxidation systems

MFC's

Calibrations

LPCVD-PECVD-systems

LVC's

Cleaning,
Repair and 
Maintenance

RTP & RTA - Systems

Valves

Automation and 
Software

System Upgrades

Pressure measurement & control

 

Wet-benches

Vacuum measurement & control

Gas systems

Gas flow standards

Thermocouples

Hot-plates

Gas/Liquid purification and filtration

Heating elements

Temperature controller

Vacuum products

Vacuum conectivity solutions

Clean room equipment

Vacuum inlet and waste gas collision traps

 

Motors

Wet etch & clean

Chemical blending and delivery modules

Magnetic Liquid Feedthroughs

Dry etch & clean

Power supply/readout

   

Photochemical filtration and dispense systems

Portable Vacuum Callibration System

Thermal control systems

Susceptors

Precursor delivery technology

 

Pressure transducers

Process Analysis

       

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